Opto-structural properties of Si-rich SiNx with different stoichiometry
Crossref DOI link: https://doi.org/10.1007/s00339-019-3258-5
Published Online: 2020-01-01
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tiour, F.
Benyahia, B.
Brihi, N.
Sari, A.
Mahmoudi, Br.
Manseri, A.
Guenda, A.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 29 September 2019
Accepted: 21 December 2019
First Online: 1 January 2020