Inline monitoring of hydrogenous plasma-induced defect formation within fused silica via plasma emission spectroscopy
Crossref DOI link: https://doi.org/10.1007/s00339-020-3347-5
Published Online: 2020-02-07
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gerhard, Christoph http://orcid.org/0000-0002-6837-2498
Letien, Emilie
Cressent, Thomas
Hofmann, Mandy
Text and Data Mining valid from 2020-02-07
Version of Record valid from 2020-02-07
Article History
Received: 15 November 2019
Accepted: 27 January 2020
First Online: 7 February 2020