Boosted anchor quality factor of a thin-film aluminum nitride-on-silicon length extensional mode MEMS resonator using phononic crystal strip
Crossref DOI link: https://doi.org/10.1007/s00339-021-04885-z
Published Online: 2021-09-05
Published Print: 2021-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ha, Thi Dep http://orcid.org/0000-0003-1414-7022
Text and Data Mining valid from 2021-09-05
Version of Record valid from 2021-09-05
Article History
Received: 11 March 2020
Accepted: 27 August 2021
First Online: 5 September 2021
Declarations
:
: The authors declare that they have no conflict of interest.