Multiscale modeling of electron beam and substrate interaction: a new heat source model
Crossref DOI link: https://doi.org/10.1007/s00466-015-1170-1
Published Online: 2015-06-06
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yan, Wentao
Smith, Jacob
Ge, Wenjun
Lin, Feng
Liu, Wing Kam
Text and Data Mining valid from 2015-06-06