Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations
Crossref DOI link: https://doi.org/10.1007/s00542-014-2145-4
Published Online: 2014-05-06
Published Print: 2014-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ihn, Yong Seok
Ji, Sang-Hoon
Moon, Hyungpil
Choi, Hyouk Ryeol
Koo, Ja Choon
Text and Data Mining valid from 2014-05-06