Nanoscale dynamics of MEMS TFC active slider
Crossref DOI link: https://doi.org/10.1007/s00542-014-2244-2
Published Online: 2014-07-10
Published Print: 2014-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sheng, Gang
Xu, Jianfeng
Text and Data Mining valid from 2014-07-10