Micromachined sample stages to reduce thermal drift in atomic force microscopy
Crossref DOI link: https://doi.org/10.1007/s00542-014-2251-3
Published Online: 2014-07-06
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sevim, Semih
Tolunay, Selin
Torun, Hamdi
Text and Data Mining valid from 2014-07-06