Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone
Crossref DOI link: https://doi.org/10.1007/s00542-014-2262-0
Published Online: 2014-07-30
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Guo Jun
Liu, Lin Xian
Zhang, Wen Dong
Xue, Chen Yang
Text and Data Mining valid from 2014-07-30