Fabrication of novel MEMS inertial switch with six layers on a metal substrate
Crossref DOI link: https://doi.org/10.1007/s00542-014-2323-4
Published Online: 2014-09-18
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Du, Liqun
Zhao, Ming
Wang, Aoan
Chen, Shengli
Nie, Weirong
Text and Data Mining valid from 2014-09-18