Recent progress in low temperature nanoimprint lithography
Crossref DOI link: https://doi.org/10.1007/s00542-014-2366-6
Published Online: 2014-11-19
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sun, Hongwen
Text and Data Mining valid from 2014-11-19