Experimental evaluation of sensitivity and non-linearity in polysilicon piezoresistive pressure sensors with different diaphragm sizes
Crossref DOI link: https://doi.org/10.1007/s00542-014-2369-3
Published Online: 2014-11-15
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kumar, S. Santosh
Ojha, Anuj K.
Pant, B. D.
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