A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor
Crossref DOI link: https://doi.org/10.1007/s00542-015-2475-x
Published Online: 2015-03-03
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jindal, Sumit Kumar
Mahajan, Ankush
Raghuwanshi, Sanjeev Kumar
Text and Data Mining valid from 2015-03-03