2-Dimensional vibration model of MEMS cantilever beams with step-up anchors
Crossref DOI link: https://doi.org/10.1007/s00542-015-2559-7
Published Online: 2015-05-26
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Kaiyue
Liao, Xiaoping
Zhang, Zhiqiang
Funding for this research was provided by:
National Natural Science Foundation of China (60976094, 61076108, 60676043)
Text and Data Mining valid from 2015-05-26