Research development of silicon MEMS gyroscopes: a review
Crossref DOI link: https://doi.org/10.1007/s00542-015-2645-x
Published Online: 2015-08-06
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhanshe, Guo
Fucheng, Cheng
Boyu, Li
Le, Cao
Chao, Lu
Ke, Song
Funding for this research was provided by:
International cooperation project (2014DFA31230)
Text and Data Mining valid from 2015-08-06