Electrostatically actuated MEMS relay arrays for high-power applications
Crossref DOI link: https://doi.org/10.1007/s00542-015-2660-y
Published Online: 2015-08-27
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ma, Bo
You, Zheng
Ruan, Yong
Chang, Shuangkai
Zhang, Gaofei
Funding for this research was provided by:
The foundation of the State Key Laboratory of Precision Measurement Technology and Instruments
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