Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm
Crossref DOI link: https://doi.org/10.1007/s00542-015-2699-9
Published Online: 2015-10-16
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ashok, Akarapu
Pal, Prem
Funding for this research was provided by:
Department of Science and Technology (SR/S3/MERC/072/2011)
Council of Scientific and Industrial Research (03(1320)/14/EMR-II)
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