Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Crossref DOI link: https://doi.org/10.1007/s00542-015-2787-x
Published Online: 2016-01-09
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Barth, Stephan
Bartzsch, Hagen
Glöß, Daniel
Frach, Peter
Modes, Thomas
Zywitzki, Olaf
Suchaneck, Gunnar
Gerlach, Gerald
Text and Data Mining valid from 2016-01-09