Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric properties
Crossref DOI link: https://doi.org/10.1007/s00542-015-2799-6
Published Online: 2015-12-31
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wistrela, E.
Schneider, M.
Bittner, A.
Schmid, U.
Funding for this research was provided by:
Austrian Science Fund (AT) (P 25212-N30)
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