Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
Crossref DOI link: https://doi.org/10.1007/s00542-016-2887-2
Published Online: 2016-03-26
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zehetner, J.
Kraus, S.
Lucki, M.
Vanko, G.
Dzuba, J.
Lalinsky, T.
Funding for this research was provided by:
The CTU grant (SGS13/201OHK3/3T713)
License valid from 2016-03-26