A stack bonded thermo-pneumatic micro-pump utilizing polyimide based actuator membrane for biomedical applications
Crossref DOI link: https://doi.org/10.1007/s00542-016-2951-y
Published Online: 2016-05-06
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hamid, Norihan Abdul
Majlis, Burhanuddin Yeop
Yunas, Jumril
Syafeeza, A. R.
Wong, Yan Chiew
Ibrahim, Mazree
Funding for this research was provided by:
MEMS Research Group, Universiti Kebangsaan Malaysia (NND/ND/(1)/TD11-002)
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