A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer
Crossref DOI link: https://doi.org/10.1007/s00542-016-2984-2
Published Online: 2016-05-21
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Singh, S. S.
Avvaru, V. N.
Veerla, S.
Pandey, A. K.
Pal, P.
Funding for this research was provided by:
Council of Scientific and Industrial Research (03(1320)/14/EMR-II)
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