A push-pull double-contact MEMS relay fabricated by MetalMUMPs process
Crossref DOI link: https://doi.org/10.1007/s00542-016-3001-5
Published Online: 2016-05-30
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Lifeng
Jin, Yue
Funding for this research was provided by:
the National Natural Science Foundation of China (61401084)
the National High Technology Research and Development Program of China (2015AA042602)
Text and Data Mining valid from 2016-05-30