Quantitative analysis of temperature effect on SOI piezoresistive pressure sensors
Crossref DOI link: https://doi.org/10.1007/s00542-016-3102-1
Published Online: 2016-08-12
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Belwanshi, Vinod
Topkar, Anita
License valid from 2016-08-12