Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes
Crossref DOI link: https://doi.org/10.1007/s00542-016-3134-6
Published Online: 2016-10-08
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Muhua
Zhao, Jiahao
You, Zheng
Zhao, Guanghong
License valid from 2016-10-08