Evolution, modelling and simulation of MEMS PWM pressure sensor employing cantilever switch and SOI diaphragm
Crossref DOI link: https://doi.org/10.1007/s00542-016-3169-8
Published Online: 2016-10-17
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sivasundari, K.
Daniel, R. Joseph
Sumangala, K.
License valid from 2016-10-17