Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers
Crossref DOI link: https://doi.org/10.1007/s00542-016-3184-9
Published Online: 2016-11-11
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maity, Reshmi
Maity, Niladri Pratap
Baishya, Srimanta
License valid from 2016-11-11