Review on macromodels of MEMS sensors and actuators
Crossref DOI link: https://doi.org/10.1007/s00542-016-3251-2
Published Online: 2017-01-11
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Xueye
Wu, Zeyang
License valid from 2017-01-11