Design, fabrication, characterization of micromachined capacitive shunt switches with low actuation voltages and low temperature packaging
Crossref DOI link: https://doi.org/10.1007/s00542-017-3290-3
Published Online: 2017-02-02
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lakshmi, S.
Manohar, Premila
Natarajan, K.
Naga Sayanu, P.
Funding for this research was provided by:
NPMASS-ADA, India
License valid from 2017-02-02