0.35 μm CMOS–MEMS low-mechanical-noise micro accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3312-1
Published Online: 2017-02-13
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Ja-Hao http://orcid.org/0000-0002-6109-160X
Huang, Chih-Wei
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (105-2622-E-035-011 -CC3)
License valid from 2017-02-13