Fabrication process induced changes in scattering parameters of meander type RFMEMS shunt switch
Crossref DOI link: https://doi.org/10.1007/s00542-017-3314-z
Published Online: 2017-02-11
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sharma, Updesh
Kumar, Manoj
Sharma, Renu
Saha, Tulana
Jain, K. K.
Dutta, Shankar
Sharma, E. K.
License valid from 2017-02-11