Deflection of circular diaphragm-type piezoactuators coupling with gas compression in micropumps
Crossref DOI link: https://doi.org/10.1007/s00542-017-3355-3
Published Online: 2017-03-13
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hu, Yuanlin
Liang, Xin
Wang, Wen
Funding for this research was provided by:
National Natural Science Foundation of China (51576123)
License valid from 2017-03-13