Si (100) and (110) etching properties in 5, 15, 30 and 48 wt%KOH aqueous solution containing Triton-X-100
Crossref DOI link: https://doi.org/10.1007/s00542-017-3368-y
Published Online: 2017-03-20
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tanaka, Hiroshi http://orcid.org/0000-0001-6874-4776
Takeda, Masato
Sato, Kazuo
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP26390042)
Text and Data Mining valid from 2017-03-20
Version of Record valid from 2017-03-20
Article History
Received: 2 December 2016
Accepted: 13 March 2017
First Online: 20 March 2017