Bulk silicon micromachined suspended fixed-end SiO2 film capacitor for passive high-pass RC filter
Crossref DOI link: https://doi.org/10.1007/s00542-017-3415-8
Published Online: 2017-04-11
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhu, Jianxiong
Zhu, Hua
License valid from 2017-04-11