Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3560-0
Published Online: 2017-10-03
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gaur, Surender P.
Kumar, Prem
Rangra, Kamaljit
Kumar, Dinesh
License valid from 2017-10-03