Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel
Crossref DOI link: https://doi.org/10.1007/s00542-017-3611-6
Published Online: 2017-10-28
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mao, Zebing
Yoshida, Kazuhiro
Kim, Joon-wan http://orcid.org/0000-0001-7273-5055
License valid from 2017-10-28