Mechanical latching stops for reliability improvement of MEMS in shock environments
Crossref DOI link: https://doi.org/10.1007/s00542-018-3714-8
Published Online: 2018-03-06
Published Print: 2018-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Kaisi
Zhang, Wei
Hao, Yilong
Text and Data Mining valid from 2018-03-06
Article History
Received: 16 November 2017
Accepted: 5 January 2018
First Online: 6 March 2018