Effect of vacuum packaging on bandwidth of push–pull type capacitive accelerometer structure
Crossref DOI link: https://doi.org/10.1007/s00542-018-3899-x
Published Online: 2018-04-10
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dutta, Shankar
Saxena, Pulkit
Panchal, Abha
Pal, Ramjay
Jain, K. K.
Bhattacharya, D. K.
Text and Data Mining valid from 2018-04-10
Article History
Received: 27 December 2017
Accepted: 5 April 2018
First Online: 10 April 2018