A novel MEMS capacitive microphone using spring-type diaphragm
Crossref DOI link: https://doi.org/10.1007/s00542-018-3951-x
Published Online: 2018-05-15
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sedaghat, Sedighe Babaei
Ganji, Bahram Azizollah http://orcid.org/0000-0001-6724-2408
Text and Data Mining valid from 2018-05-15
Article History
Received: 3 May 2018
Accepted: 11 May 2018
First Online: 15 May 2018