Fabrication and characterization of polysilicon-on-insulator (PolySOI) and a-SOI based micro piezoresistive pressure sensor for harsh environment applications
Crossref DOI link: https://doi.org/10.1007/s00542-019-04358-7
Published Online: 2019-02-19
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sheeparamatti, B. G.
Balavalad, Kirankumar B.
Text and Data Mining valid from 2019-02-19
Article History
Received: 8 December 2018
Accepted: 12 February 2019
First Online: 19 February 2019