Superior performance area changing capacitive MEMS accelerometer employing additional lateral springs for low frequency applications
Crossref DOI link: https://doi.org/10.1007/s00542-020-04776-y
Published Online: 2020-02-12
Published Print: 2020-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Solai, Kannan
Rathnasami, Joseph Daniel http://orcid.org/0000-0001-6272-4985
Koilmani, Sumangala
Text and Data Mining valid from 2020-02-12
Version of Record valid from 2020-02-12
Article History
Received: 10 December 2019
Accepted: 4 February 2020
First Online: 12 February 2020