Towards improved reliability of RF-MEMS: mechanical aspects and experimental testing of a micro-switch design with embedded active self-recovery mechanism to counteract stiction
Crossref DOI link: https://doi.org/10.1007/s00542-020-04886-7
Published Online: 2020-05-17
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Iannacci, J. http://orcid.org/0000-0001-6462-4814
Text and Data Mining valid from 2020-05-17
Version of Record valid from 2020-05-17
Article History
Received: 24 March 2020
Accepted: 13 May 2020
First Online: 17 May 2020