OEE improvement by pogo pin defect detection in wafer probing process
Crossref DOI link: https://doi.org/10.1007/s00542-020-05189-7
Published Online: 2021-02-20
Published Print: 2021-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yeo, Woonyoung http://orcid.org/0000-0002-2719-4066
Chang, Yung-Chia
Liu, Wayne
Text and Data Mining valid from 2021-02-20
Version of Record valid from 2021-02-20
Article History
Received: 25 September 2020
Accepted: 13 December 2020
First Online: 20 February 2021