Co-W nanocrystalline electrodeposits as barrier for interconnects
Crossref DOI link: https://doi.org/10.1007/s10008-014-2488-x
Published Online: 2014-05-11
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsyntsaru, N.
Kaziukaitis, G.
Yang, C.
Cesiulis, H.
Philipsen, H. G. G.
Lelis, M.
Celis, J.-P.
Text and Data Mining valid from 2014-05-11