Simple and accurate optical height sensor for wafer inspection systems
Crossref DOI link: https://doi.org/10.1007/s10043-015-0160-z
Published Online: 2015-12-31
Published Print: 2016-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shimura, Kei
Nakai, Naoya
Taniguchi, Koichi
Itoh, Masahide
Text and Data Mining valid from 2015-12-31