Efficient phase matching algorithm for measurements of ultrathin indium tin oxide film thickness in white light interferometry
Crossref DOI link: https://doi.org/10.1007/s10043-017-0304-4
Published Online: 2017-02-15
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Kai
Lei, Feng
Itoh, Masahide
License valid from 2017-02-15