Fabrication of ITO diffraction grating structure for infrared plasmonics by thermal nanoimprint lithography
Crossref DOI link: https://doi.org/10.1007/s10043-022-00759-8
Published Online: 2022-08-30
Published Print: 2022-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hasuike, Noriyuki http://orcid.org/0000-0001-8327-6827
Maeda, Takeshi
Takeda, Minoru
Text and Data Mining valid from 2022-08-30
Version of Record valid from 2022-08-30
Article History
Received: 21 February 2022
Accepted: 15 August 2022
First Online: 30 August 2022