The squeeze-film air damping of circular and elliptical micro-torsion mirrors
Crossref DOI link: https://doi.org/10.1007/s10404-015-1585-1
Published Online: 2015-04-30
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xia, Changfeng
Qiao, Dayong
Zeng, Qi
Yuan, Weizheng
Funding for this research was provided by:
National Natural Science Foundation of China (51375399)
Fundamental Research Funds for the Central Universities (3102014KYJD023)
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