Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
Crossref DOI link: https://doi.org/10.1007/s10470-014-0484-9
Published Online: 2015-01-13
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grixti, Ryan
Grech, Ivan
Casha, Owen
Darmanin, Jean Marie
Gatt, Edward
Micallef, Joseph
Text and Data Mining valid from 2015-01-13