Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique
Crossref DOI link: https://doi.org/10.1007/s10544-014-9868-y
Published Online: 2014-05-23
Published Print: 2014-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Junshan
Zhang, Dong
Sha, Baoyong
Yin, Penghe
Xu, Zheng
Liu, Chong
Wang, Liding
Xu, Feng
Wang, Lin
Text and Data Mining valid from 2014-05-23