Use of Alkaline Glass in Micromechanical Sensor Structures
Crossref DOI link: https://doi.org/10.1007/s10717-019-00151-0
Published Online: 2019-08-01
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pautkin, V. E.
Text and Data Mining valid from 2019-07-01
Version of Record valid from 2019-07-01
Article History
First Online: 1 August 2019